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| Main indicators and parameters of the equipment | |
| Maximum temperature | 1200ºC |
| Carrying method | setter plate |
| Heating method | electrical heating |
| Oxygen content | Nitrogen+hydrogen+water vapor atmosphere protection, with a hydrogen content of approximately 1%~1.5% |
| Furnace atmosphere | Mixed atmosphere |
| Temperature stability | ±4ºC/2h |
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